WebPower supply*5 AC100 V (±10 %), 50/60 Hz, 1.25 kVA Grounding 100 Ω or less Argon gas cylinder Pure gas (99.99 % or more) Pressure regulator Secondary pressure regulation range 0.03 to 0.05 Mpa Argon gas connecting pipe*6 ¼-inch SUS pipe, Length within 2 m Argon gas joint ¼-inch Swagelok type pipe WebThe DC-sputter power supplies are very compact built switched mode power supplies in the power range from 1kW up to 30kW DC. The generators are ideal for powering small …
RF-Sputtering principles - CNR
Web15 Dec 2003 · Arcing is a well-known, unwanted discharge regime observed on the surface of sputtering targets. The discharge voltage breaks down to less than 50 V while the current jumps to elevated levels. Arcing is unwanted because it prevents uniform deposition and creates particulates. WebWe have built DC power supplies for voltages of 300 Watts through 20 kWatts, and pulsed DC supplies for 1 kW through 10 kW. We also have RF supplies for voltages of 125 Watts … havilah ravula
Physics of arcing, and implications to sputter deposition
Web27 Oct 2016 · A DC Sputtering system typically requires between –s 2 to -5kV , whereas RF Sputtering needs 1012 volts to sputter dielectric insulators. Radio waves require much … Webinteraction between the power supply and the plasma developed, the power supply design evolved from a simple powering element to a key element in the system. This resulted … WebSputtering Power Supplies There are several types of power supplies used in magnetron sputtering, these include DC, RF, Pulsed DC, MF AC, and HIPIMS. Below is a brief … 40 South Linden Street - Duquesne, PA 15110 - USA. Search. Search Symbols Melting Point Name # 0.95 K-272.05 °C-458 °F: Helium: He: 2: 14.025 K … Magnetron Sputtering Technology. Angstrom Sciences is a leading … The "Rate" data are representative of the film deposition rate at maximum power … These magnetrons are compatible with both DC , RF and DC pulsed power … Confocal Sputtering. Confocal or Combinatorial Sputtering is a technique … The Angstrom Advantage . Magnetron sputtering technology has been utilized … Sputtering Applications. Angstrom Sciences designs, engineers, and manufactures a … havilah seguros