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WebNov 15, 2024 · Fig. 1: IMS Nanofabrication’s multi-beam tool. Source: IMS. SE: Multi-beam mask writers are faster than VSB tools, but single-beam tools are still being used and have been extended to advanced nodes. What happened? Platzgummer: At that time, there were some favorable developments that extended the life of VSB. People introduced multi … WebNov 14, 2024 · BSEs belong to the primary electron beam and are reflected back after elastic interactions between the beam and the sample. By contrast, secondary electrons … hora itc
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